Theoretical and experimental studies related to the compositional and microstructural evolution of alumina thin films [Elektronische Ressource] / vorgelegt von Eva Johanna Lovisa Rosén

Theoretical and Experimental Studies Related to the Compositional and Microstructural Evolution of Alumina Thin Films Von der Fakultät für Georessourcen und Materialtechnik der Rheinisch -Westfälischen Technischen Hochschule Aachen zur Erlangung des akademischen Grades eines Doktors der Naturwissenschaften genehmigte Dissertation vorgelegt von Fil. Lic. Eva Johanna Lovisa Rosén aus Habo, Schweden Berichter: Univ.-Prof. Jochen M. Schneider, Ph. D. Univ.-Prof. Dr.rer.nat. Matthias Wuttig Tag der mündlichen Prüfung: 07. Dezember 2004 Diese Dissertation ist auf den Internetseiten der Hochschulbibliothek online verfügbar i ii Abstract In this thesis, the correlation between plasma chemistry / ion energy and thin film composition / microstructure for cathodic arc deposited alumina thin films is investigated. To contribute towards understanding this correlation, both theoretical and experimental investigations have been performed. The plasma, constituting the feed-stock material for the film growth, was characterized with respect to chemistry, for a pulsed arc showing a temporal dependence from pulse-to-pulse as well as within a pulse. Further plasma analysis of a DC arc source showed charge- and pressure dependent ion energy distributions including ions in excess of 200 eV, which could be manipulated by suitable magnetic field configuration.