EPNES Tutorial on MEMS BK

Power Engineering concepts for Industrial Engineerseconcepor alTutorial on Micro Electro Mechanical Systems (MEMS)Bruce KimDepartment of Electrical Engineering, Arizona State University Arizona State UniversityArizona State University1Power Engineering concepts for Industrial Engineerseconcepor alMEMS! What is MEMS! Why MEMS! Applications! MEMS Fabrication! MEMS Packaging! ConclusionArizona State UniversityArizona State University2Power Engineering concepts for Industrial Engineerseconcepor alWHAT IS MEMS! MEMS CONTAINS COMPONENTS OF 1 MICROMETER TO 1 MILLIMETER! CONSTRUCTED TO ACHIEVE A CERTAIN ENGINEERING OR FUNCTIONS BY ELECTROMECHANICAL OR ELECTROCHEMICAL MEANS.Arizona State UniversityArizona State University3Power Engineering concepts for Industrial Engineerseconcepor alA MEMS structureArizona State UniversityArizona State University4Power Engineering concepts for Industrial Engineerseconcepor alA gear chain with a miteArizona State UniversityArizona State University5Power Engineering concepts for Industrial Engineerseconcepor alELEMENTS OF MEMS! TWO PRINCIPLE COMPONENTS! SENSING OR ACTUATING ELEMENT! SIGNAL TRANSDUCTION UNITArizona State UniversityArizona State University6Power Engineering concepts for Industrial Engineerseconcepor alMEMS AS MICROSENSORPowersupplyTrans ductionInput OutputMicro sensingunitsignal signalelementArizona State UniversityArizona State University7Power Engineering concepts for ...