Silicon nanowires [Elektronische Ressource] : synthesis, fundamental issues, and a first device / von Volker Schmidt

Silicon Nanowires: Synthesis, FundamentalIssues, and a First DeviceDissertationzur Erlangung des akademischen Gradesdoctor rerum naturalium (Dr. rer. nat.)vorgelegt derMathematisch-Naturwissenschaftlich-Technischen Fakultat¤(mathematisch-naturwissenschaftlicher Bereich)der Martin-Luther-Universitat¤ Halle-Wittenbergvon Volker Schmidtgeboren am 28. Juni 1977 in BraunschweigGutachter /in2. Prof. Dr. W. SeifertHalle (Saale), den 28.5.2006verteidigt am 13.12.2006urn:nbn:de:gbv:3-000011060[http://nbn-resolving.de/urn/resolver.pl?urn=nbn%3Ade%3Agbv%3A3-000011060]1. Prof. Dr. U. GöselePrefaceThe purpose of this thesis is to illuminate several aspects regarding the synthesis of siliconnanowires, their electrical properties, and the fabrication of a rst device made thereof.Following an introductory survey of important results in silicon nanowire research, Chapter1 deals with silicon nanowire growth from an experimental point of view. After a detaileddescription of the experimental setup, the wafer preparation, and the growth procedure,experimental results concerning the epitaxial growth of silicon nanowires with gold arepresented. Gold is presently the standard catalyst material for silicon nanowire growth.Yet, serious concerns exist, whether silicon nanowires grown with gold as catalyst can everbecome compatible with existing electronics fabrication technology. Therefore, replacinggold by an alternative catalyst material is of great importance.