Radiation-induced defects in calcium fluoride and their influence on material properties under 193 nm laser irradiation [Elektronische Ressource] / Stephan Rix

Radiation-induced Defects in Calcium FluorideandTheir In uence on Material Properties under 193 nm Laser IrradiationDissertationzur Erlangung des Grades\Doktor der Naturwissenschaften"am Fachbereich Physik, Mathematik und Informatikder Johannes Gutenberg-Universit at in MainzStephan Rixgeb. in MainzMainz, den 28. Januar 2011 1. Berichterstatterin: Namen gelöscht 2. Berichterstatter: Namen gelöscht Tag der mündlichen Prüfung: 9. Juni 2011 AbstractCalcium uoride (CaF ) is one of the key lens materials in deep-ultraviolet mi-2crolithography because of its transparency at 193 nm and its nearly perfect opticalisotropy. Its physical and chemical properties make it applicable for lens fabrication.The key feature of CaF is its extreme laser stability.2After exposing CaF to 193 nm laser irradiation at high uences, a loss in optical2performance is observed, which is related to radiation-induced defect structures inthe material. The initial rapid damage process is well understood as the formationof radiation-induced point defects, however, after a long irradiation time of up to 2months, permanent damage of the crystals is observed. Based on experimental re-sults, these pt radiation-induced defect structures are identi ed as metallicCa colloids.