Properties of nanocrystalline cubic boron nitride films [Elektronische Ressource] / Nataliya Deyneka

PROPERTIES OF NANOCRYSTALLINECUBIC BORON NITRIDE FILMSDissertationzur Erlangung desDoktorgrades Dr. rer. nat. der Fakultät für Naturwissenschaften derUniversität Ulmvorgelegt vonNataliya Deynekaaus Poltava, Ukraine2003Amtierender Dekan: Prof. Dr. R. J. BehmErstgutachter: PD Dr. H.-G. BoyenZweitgutachter: Prof. Dr. R. SauerTag der Promotion: 7.05.2003ContentChapter 1 Introduction.........................................................................................................1Chapter 2 Boron Nitride - State of the Art....42.1 Phenomenology..............42.2 Growth of Cubic Boron Nitride ...................................................................................7 2.2.1 Factors Controlling Formation of the Cubic Phase.................8 2.2.2 Survey of Cubic Boron Nitride Film Synthesis Techniques .................................102.3 Open Questions ............................................................................12 2.3.1 Adhesion................................................12 2.3.2 Crystallinity...........15 2.3.3 Grain Boundary Diffusion.....................................................15Chapter 3 Results and Discussion...................................................183.1 Preparation of Boron Nitride Films ...........................................18 3.1.1 Apparatus: Preparation and Analysis Chamber.....................18 3.1.2 Deposition Details ..........