Product engineering for silicon based MEMS IP [Elektronische Ressource] / von Dirk Ortloff

Product Engineering for siliconbased MEMS IPVom Fachbereich Elektrotechnik und Informatik derUniversitat¨ Siegenzur Erlangung des akademischen GradesDoktor der Ingenieurwissenschaften(Dr. Ing.)Genehmigte DissertationvonDipl. Inf. Dirk Ortloff1. Gutachter: Prof. Dr. Rainer Bruc¨ k2.: Prof. Dr. Albert AlbersVorsitzender: Prof. Dr. Hans WojtkowiakTag der mundlichen¨ Prufung:¨ 26.06.2006urn:nbn:de:hbz:467 2287DerMenschwirftdasLos;aberesfallt¨wiederHerrwill.Spruche¨ 16,33AbstractToday the silicon based Micro Electro Mechanical Systems (MEMS) industryhas inadequate development methodologies and frameworks. This is espe cially true when developing MEMS process and design Intellectual Property(IP). The existing methods and frameworks are not accommo dating for the necessary areas and components required for efficient, repro ducible and controlled MEMS IP development. As such issues have not beenaddressed,thisresultsine.g. unresolveddevelopmentmethodologyquestionsandnon systematicstorageofproductdeliverables.This thesis proposes a systematic development approach to tackle severalof such insufficiencies. It proposes a novel MEMS IP development methodol ogy guiding the developments from a product idea to a marketable product.Because the business processes of the method require tool support, a qualityintegratedProductEngineeringFrameworkisproposedsupportingthekeyar-eas.