Processing of interferometric data [Elektronische Ressource] / vorgelegt von Stefan Trittler

INAUGURAL—DISSERTATIONzurErlangungderDoktorwürdederNaturwissenschaftlich MathematischenGesamtfakultätderRuprecht–Karls–UniversitätHeidelbergvorgelegtvonDipl. Ing. StefanTrittlerausLeonbergTagdermündlichenPrüfung:ProcessingofInterferometricDataGutachter: Prof. Dr. FredA.HamprechtAbstractIn this thesis, fast and highly accurate interferometric metrology systems for bothsmoothandroughsurfacesarepresented. First,high speedalgorithmsforwhite lightinterferometry (WLI) and line scanning WLI are developed and their performance iscompared. For large height differences, multiple wavelength interferometry is signif icantlyfaster, though, as inthis approachthenumber offrames requiredfora surfaceestimatedoesnotincreasewithsurfaceheightrange.A system based on a tunable diode laser is discussed in detail, and new samplingschemes and estimation algorithms for the device are derived. An approximation tothetheoreticallyoptimalsamplingpatternisgivenandacorrespondingfastestimationalgorithmispresented. Asabuildingblockforthatalgorithm,accurateandfastphaseand frequency estimation from a low number of samples is discussed, and a new ap proach based on an interpolated FFT is presented. The influence of laser speckle onrough surfaces is investigated. A robust, adaptive filtering algorithm is developed.