Nanofocusing refractive X-ray lenses [Elektronische Ressource] / von Pit Boye

Nanofocusing Refractive X-RayLensesDissertationzur Erlangung des akademischen GradesDoctor rerum naturalium(Dr. rer. nat.)vorgelegt derFakultat Mathematik und Naturwissenschaften derTechnischen Universitat DresdenvonDiplom-Physiker Pit Boyegeboren am 22.02.1980in WittenEingereicht am 5. November 2009Die Dissertation wurde in der Zeit von 05/2006 bis 11/2009im Institut fur Strukturphysik angefertigt.Gutachter: Prof. Dr. C. G. SchroerProf. Dr. T. SaldittDatum des Rigorosum: 5. Februar 2010Prufer: Prof. Dr. C. G. SchroerProf. Dr. K. LeoDatum der Disputation: 5. Februar 2010Promotionskommission: Prof. Dr. W. Strunz (Vorsitz)Prof. Dr. C. G. SchroerProf. Dr. T. SaldittProf. Dr. K. LeoProf. Dr. H.-H KlausPD Dr. Sr. Grafstr om (Protokoll)AbstractThis thesis is concerned with the optimization and development of the production ofnanofocusing refractive x-ray lenses. These optics made of either silicon or diamond arewell-suited for high resolution x-ray microscopy. The goal of this work is the design of areproducible manufacturing process which allows the production of silicon lenses with highprecision, high quality and high piece number. Furthermore a process for the productionof diamond lenses is to be developed and established.In this work, the theoretical basics of x-rays and their interaction with matter are de-scribed. Especially, aspects of synchrotron radiation are emphasized. Important in x-raymicroscopy are the di erent optics.