Microprocessing of silicon and metals with high pulse repetition rate picosecond lasers ; Silicio ir metalų mikroapdirbimas didelio impulsų pasikartojimo dažnio pikosekundiniais lazeriais

VILNIUS UNIVERSITY CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY INSTITUTE OF PHYSICS Marijus Brikas MICROPROCESSING OF SILICON AND METALS WITH HIGH-PULSE-REPETITION-RATE PICOSECOND LASERS Summary of doctoral thesis Technological sciences, Material engineering (08 T), Laser technology (T 165) Vilnius, 2011 Dissertation was prepared in 2005 – 2009 at Institute of Physics of the Center for Physical Sciences and Technology (CPST) Scientific supervisor: Dr. Gediminas Ra čiukaitis (Institute of Physics, CPST, technological sciences, material engineering – 08T, laser technologies – T165) Doctoral thesis will be defended at the Center for Physical Sciences and Technology in the senate of Material engineering: Chairman: Prof. habil. Dr. Valerijus Smilgevi čius (Vilnius University, technological sciences, material engineering – 08T, laser technologies – T165) Members: 1. Prof. habil. Dr. Ar ūnas Krotkus (Semiconductor physics institute, CPST, technological sciences, material engineering – 08T, laser technologies – T165) 2. Prof. habil. Dr. Eugenijus Šatkovskis (Vilnius Gediminas Technical University, mate laser technologies – T165) 3. Prof. habil. Dr. Rimantas Vaišnoras (Vilnius Pedagogical University, physical sciences, physics – 02P) 4. Dr. Irmantas Kašalynas (Semiconductor physics institute, CPST, physical sciences, physics – 02P) Official opponents: 1. Prof. habil. Dr.