Micromachined transmission lines for microwave applications [Elektronische Ressource] / Ricardo Osorio

Micromachined Transmission Lines for Microwave ApplicationsDissertation zur Erlangung des Doktorgradesder Fakultät für Angewandte Wissenschaftender Albert-Ludwigs Universität Freiburg im BreisgauRicardo Osorio2003 Dekan: Prof. Dr. T. OttmannReferenten: Prof. Dr. J. G. Korvink, Prof. Dr. J. WildeDatum: 28. Oktober 2003 CONTENTSContents 3Abstract 5Zusammenfassung 71Introduction 91.1 High frequency requirements of modern electronic systems 101.2 State-of-the-art MEMS micromachining 121.3 State-of-the-art transmission lines and waveguides 151.4 Organization of the thesis 211.5 Major Results 212Simulation 232.1 Maxwell’ s Equations 232.2 Telegrapher equation in circuit theory 332.3 Quasi-static Simulation and Modeling 382.4 Full-Wave Simulation 463 Technology and Fabrication 593.1 SU-8 as dielectric and micromachined material 593.2 SU-8 process recipe 643.3 Technology considerations 653.4 Technology of metallization 693.5 Fabrication sequence of the strip line 743.6 Layout 773.7 Fabrication results 86 4 Characterization and modeling 914.1 On-wafer microwave measurements 914.2 Line parameters from S-parameters 934.3 Line parameters of strip lines 944.4 Equivalent circuit model for the strip line 1004.5 Strip line filters 1095 Final remarks 1115.1 Summary 1115.2 Conclusion 1125.3 Outlook 113Appendix 115A.