Investigations on the electron dynamics in the neutral loop discharge [Elektronische Ressource] / von Dragos Liviu Crintea

Investigations on the electron dynamics in the Neutral Loop Discharge Dissertation zur Erlangung des Grades eines Doktors der Naturwissenschaften in der Fakultät für Physik und Astronomie der Ruhr-Universität Bochum von Dragos Liviu Crintea aus Iasi Bochum 2009 Dissertation eingereicht am Tag der Disputation: 18.12.20091. Gutachter: Prof. Dr. U. Czarnetzki 2. Gutachter Prof. Dr. R. P. Brinkmann Table of contents Chapter 1 Introduction ……………………………………………………………….. 1 1.1 Overview of the thesis …………………………………………………….. 2 Chapter 2 Radio frequency plasma discharge fundamentals ………………………… 4 2.1 Inductively Coupled Plasma (ICP) discharge …………………................... 4 2.2 Neutral Loop Discharge ………………………………………………….... 9 Chapter 3 Experimental setup description and applied diagnostic techniques …….... 15 3.1 Introduction ………………………………………………………………. 15 3.2 Experimental setup ……………………………………………………….. 16 3.3 Applied plasma diagnostic techniques ………………………………….... 25 Chapter 4 Plasma source characterization …………………………………………... 55 4.1 Introduction ………………………………………………………………. 55 4.2 Langmuir probe measurements …………………………………………... 56 4.3 Neutral gas depletion in the NLD ……………………………………….... 88 4.4 Thomson scattering measurements ……………………………………….. 91 4.