Fabrication and characterisation of ferroelectric lead zirconate titanate and strontium bismuth tantalate thin films [Elektronische Ressource] / von Serhiy Matichyn

Fabrication and Characterisation of Ferroelectric Lead Zirconate Titanate and Strontium Bismuth Tantalate Thin Films Dissertation zur Erlangung des akademischen Grades Doktoringenieur (Dr.-Ing.) von M.Sc. Serhiy Matichyn geb. am 14.07.1979 in Rachiw genehmigt durch die Fakultät für Elektrotechnik und Informationstechnik der Otto-von-Guericke-Universität Magdeburg Gutachter: Prof. Dr. E. P. Burte Prof. Dr. F. T. Edelmann Promotionskolloquium am 25. Juli 2006 i Content 1. Introduction 1 1.1 Purpose of Research 1 1.2 Requirements for the Processing of Ferroelectric Material 1 1.3 Choice of Bottom Electrodes 2 1.4 Objectives of Research 2. Fundamentals 3 2.1 Feroelctri Memories 3 2.2 About Ferroelectric Materials 4 2.3 Writing and Reading Cell Data 9 2.4 Reliability of Ferroelectrics 13 2.4.1 Data Retention Characteristics 13 2.4.2 Fatigue 14 2.4.3 Relaxation 15 2.5 Crystal Structure of Pb(Zr,Ti)O (PZT) Films 15 32.6 Strontium Bismuth Tantalate as an Alternative Material for FRAMs 19 2.7 Electrode Materials for Ferroelectric Capacitors 22 3. Liquid Delivery Metalorganic Chemical Vapour Deposition Technique 23 3.1 Introduction 23 3.2 Experimental Equipment 24 3.2.1 Advantages 26 3.2.2 Equipment Setup 26 3.