Diagnostics and modeling of an inductively coupled radio frequency discharge in hydrogen [Elektronische Ressource] / von Victor Anatolievich Kadetov

Diagnostics and modeling of an inductively coupled radio frequency discharge in hydrogen Dissertation zur Erlangung des Grades eines Doktors der Naturwissenschaften in der Fakultät für Physik und Astronomie der Ruhr-Universität Bochum von Victor Anatolievich Kadetov aus Moskau Dissertation eingereicht am: 10.05.2004. Tag der mündlichen Prüfung: 19.06.2004. Referent: Prof. Dr. rer. nat. Uwe Czarnezki Korreferent: Prof. Dr. rer. nat. Ralf Peter Brinkmann Bochum 2004 Contents 1. Introduction..................................................................................5 2. Brief review on ICPs ....................................................................8 3. Fundamentals .............................................................................11 3.1. RF discharge basics11 3.1.1. Plasma generation in RF discharges ............................................................11 3.1.2. RF discharges classification ..........................................................................13 3.1.3. CCP discharges ..............................................................................................14 3.1.4. ICP discharges................................................................................................17 3.2. Diagnostic tools....................................................................................