Development of an advanced low energy focused ion beam system based on immersion optics [Elektronische Ressource] / vorgelegt von Michael Rauscher

Development of an Advanced LowEnergy Focused Ion Beam SystemBased on Immersion OpticsDissertationzur Erlangung des Grades eines Doktorsder Naturwissenschaftender Fakult¨ at fur¨ Mathematik und Physikder Eberhard-Karls-Universit¨ at zu Tubingen¨vorgelegt vonMichael Rauscheraus Hechingen2006Tag der mundlic¨ hen Prufung:¨ 31.07.2006Dekan: Prof. Dr. Peter Schmid1. Berichterstatter: Prof. Dr. Erich Plies2. Berichters Prof. Dr. Oliver EiblMeiner Großmutter Gretel Turk.¨ContentsI Introduction 11 Introduction 32 FIB Systems in TEM Sample Preparation 52.1 StateoftheartTEMsamplepreparation.............. 62.1.1 Conventionalsamplepreparation 62.1.2 FIBtechnique......................... 62.2 Useoflowenergyfocusedionbeamsystems........ 83 Low Energy Focused Ion Beam System Design 113.1 Operationmodes........................... 123.2 Systemswithtargetonground..... 133.3 Systemswithtargetonhighvoltage...... 19II Numerical Simulation 274 Aberration-Optical Treatment 294.1 Fundamentals of the aberration approach.............. 294.2 Method ............................ 304.2.1 Quantificationoftheprobesize.... 304.2.2 Systemoptimisation...... 34.2.3 Software...... 344.3 Results............................. 364.3.1 Gunlens...... 364.3.2 Objectivelens.......... 384.3.3 In-lensscanning............. 404.3.4 Lensoptimisation................... 414.3.5 Summaryandoveralsystemperformance......... 435 Impact of Coulomb Interactions 455.