Development of a traceable atomic force microscope with interferometer and compensation flexure stage [Elektronische Ressource] / von Chao-Jung Chen

DissertationDevelopment of a Traceable Atomic Force Microscopewith Interferometer and Compensation Flexure StageVorgelegt der Fakultät für MaschinenbauDer Technische Universität Ilmenauzur Erlangung des akademischen GradesDoktoringenieur (Dr.-Ing.)von M.S. Chao-Jung Chen,Geboren am 19. 01. 1960 in Taoyuan, TaiwanGutachter: Univ.-Prof. Dr.-Ing. habil. G. Jäger, TU Ilmenau Prof. Dr.-Ing. habil. K. Hasche, PTB Braunschweig PhD Tzeng-Yow Lin, ITRI, Hsinchu/Taiwanvorgelegt: 07. January 2003verteidigt: 27. May 2003Verfahrensnummer: MB 96PrefaceThis study is created by Dr. Jia-Ruey Duann, Deputy General Director of Center forMeasurement Standards (CMS), and Prof. Dr.-Ing. habil. Gerd Jäger, Head of the Institute ofProcess Measurement and Sensor Technology (PMS), Faculty of Mechanical Engineering,Technische Universität Ilmenau. When Prof. Jäger visiting to the CMS during the tenthanniversary of National Measurement Laboratory in 1997, he gave some lectures anddiscussed with the colleagues of Dimensional Measurement Laboratory about the miniaturelaser interferometer and its applications. I also introduced my project of the development oflinewidth measurement and some nanometrology researches in CMS. Prof. Jäger wasinterested in a Metrological Atomic Force Microscope (MAFM), and long travel range ofnanopositioning stage with feedback by laser interferometer. He asked me to be a doctoralstudent like Mr.