Development and characterisation of a process technology for a {0.25_m63m [0.25-mu-m] SiGe:C RF-BiCMOS embedded flash memory [Elektronische Ressource] / Alexander Fox

Development and Characterisation of a Process Technology for a 0.25μm SiGe:C RF-BiCMOS embedded Flash Memory Dissertation Zur Erlangung des akademischen Grades Doktor der Ingenieurwissenschaften (Dr.-Ing.) der Technischen Fakultät der Christian-Albrechts-Universität zu Kiel Alexander Fox Kiel 2006 1. Gutachter Prof. Dr.-Ing. Peter Seegebrecht 2. Gutachter Prof. Dr. rer. nat. Helmut Föll 3. Gutachter Prof. Dr.-Ing. Reinhard Knöchel Datum der mündlichen Prüfung 11.7.2006 Acknowledgements During the time of this dissertation project I worked as part of the scientific staff at the IHP microelectronics research centre, Frankfurt (Oder), Germany. The dissertation has been supervised by Professor Dr.-Ing. Peter Seegebrecht of the “Technische Fakultät der Christian-Albrechts-Universität“, Kiel, Germany. First of all I want to thank Professor Dr.-Ing. Peter Seegebrecht for the supervision of this dissertation, for the confidence he put in me and especially for the time and effort that this required to spend. I enjoyed all the discussions, which gave this dissertation-project a clear structure. Next I want to thank Professor Dr. rer. nat. Helmut Föll and Professor Dr.-Ing. Reinhard Knöchel to agree to take the responsibility and effort of being the second revisers.