CuInS_1tn2 thin films for photovoltaic [Elektronische Ressource] : RF reactive sputter deposition and characterization / von Yunbin He

CuInS Thin Films for Photovoltaic:2RF Reactive Sputter Deposition andCharacterizationDissertationYunbin HeJUSTUS-LIEBIG-UNIVERSITÄTGIESSENCuInS Thin Films for Photovoltaic:2RF Reactive Sputter Deposition and Characterizationvorgelegte DissertationvonYunbin Heim Fachbereich 07 (Physik) der Justus-Liebig-Universität Gießenzur Erlangung des akademischen Grades Dr. rer. nat.Berichterstatter: Prof. Dr. Bruno K. MeyerProf. Dr. Claus-Dieter KohlI. Physikalisches InstitutJustus-Liebig-Universität GießenGießen, Mai 2003Contents1 Introduction ............................................................................................. 12 CuInS materials and properties: a brief review………………….…. 522.1 Crystal structure ....................................................................................................52.2 Physical properties ................................................................................................82.2.1 Electronic and optical properties.................................................................82.2.2 Electrical properties...................................................................................103 Radio frequency sputtering: principle and film deposition ................133.1 Sputtering principle and apparatus.......................................................................133.2 Film deposition ...............................................................................................