Conducting polymers as charge dissipator layers for electron beam lithography [Elektronische Ressource] / vorgelegt von Rafael Abargues López

i Conducting polymers as charge dissipator layers for electron beam lithography Den Naturwissenschaftlichen Fakultäten der Friedrich-Alexander-Universität Erlangen-Nürnberg zur Erlangung des Doktorgrades vorgelegt von Rafael Abargues López aus Valencia, Spanien ii Als Dissertation genehmigt von den Naturwissenschaftlichen Fakultäten der Universität Erlangen-Nürnberg. Tag der mündlichen Prüfung: 23.06.2006 Vorsitzender der Promotionskommission: Prof. Dr. D-P. Häder Erstberichterstatter: Prof. Dr. U. Nickel Zweitberichterstatter: Prof. T. Clark iii Dedicated to my family iv v vi viiACKNOWLEDGEMENTS This thesis is the result of four years of work at the Physical and Theoretic Chemistry chair of the Friedrich-Alexander University Erlangen-Nuremberg and at the Research and Development Department at Infineon Technologies AG in Erlangen (Germany). With sincere gratitude, I wish to express my sincere thanks to Prof. Dr. Ulrich Nickel, for accepting me into his group as a Ph.D. candidate. His guidance, encouragement, and sincerity were of invaluable importance in helping me to complete my work, to accomplish my goals and to improve as a person. I am especially grateful to Dr.