Absolute number density and kinetic analysis of CF, CF_1tn2 and C_1tn2_1tn4 molecules in pulsed CF_1tn4,H_1tn2 rf plasmas [Elektronische Ressource] / vorgelegt von: Sergey Stepanov

ERNST{MORITZ{ARNDT{UNIVERSITATGREIFSWALDAbsolute number density and kinetic analysisof CF, CF and C F molecules in2 2 4pulsed CF /H rf plasmas4 2I n a u g u r a l d i s s e r t a t i o nzurErlangung des akademischen Gradesdoctor rerum naturalium (Dr. rer. nat.)an der Mathematisch{Naturwissenschaftlichen FakultatderErnst{Moritz{Arndt{Universitat Greifswaldvorgelegt von: Sergey Stepanovgeboren am 17. November 1980in Sankt{Petersburg (Russland)Greifswald, 26. April 2010Dekan: Prof. Dr. Klaus Fesser1. Gutachter: Prof. Dr. Jurgen Meichsner2. Gutachter: Prof. Dr. Uwe CzarnetzkiTag des Promotionskolloquiums: 09. Juli 2010ContentsAbbreviations iiiList of symbols vGeneral introduction 11 Fluorocarbon RF plasmas 51.1 Fluorocarbon plasmas and their applications . . . . . . . . . . . . . . 51.2 Capacitively coupled RF discharges . . . . . . . . . . . . . . . . . . . 71.3 Gas phase processes in uorocarbon plasmas . . . . . . . . . . . . . . 101.4 Reactive plasma{surface interaction . . . . . . . . . . . . . . . . . . . 151.5 Diagnostic methods for gas phase analysis in uorocarbon plasmas . . 171.6 Experimental techniques for uorocarbon thin lms characterization . 202 Basics on molecular spectroscopy 232.1 Structure of molecular spectra . . . . . . . . . . . . . . . . . . . . . . 232.1.1 Vibrational energy levels and transitions . . . . . . . . . . . . 242.1.2 Rotational energy levels and transitions . . . . . . . . . . . . . 272.1.