A landmark based method for the geometrical 3D calibration of scanning microscopes [Elektronische Ressource] / vorgelegt von Martin Ritter

A landmark-based method for the geometrical3D calibration of scanning microscopesvorgelegt vonDipl. Natw. ETH Martin Ritteraus Ruggell, Furstentum Liechtenstein¨von der Fakultat VI¨der Technischen Universitat Berlin¨zur Erlangung des akademischen GradesDoktor der Ingenieurwissenschaften– Dr.-Ing. –genehmigte DissertationVorsitzender: Prof. Dr.-Ing. Lothar Gru¨ndigGutachter: Prof. Dr.-Ing. Olaf HellwichProf. Dr.-Ing. Jorg Albertz¨Dr. rer. nat. Heinz HohenbergTag der wissenschaftlichen Aussprache: 30. Oktober 2006Berlin 2007D 83AbstractThis thesis presents a new strategy and a spatial method for the geometric calibration of 3Dmeasurement devices at the micro-range, based on spatial reference structures with nanometer-sized landmarks (nanomarkers). The new method was successfully applied for the 3D calibrationof scanning probe microscopes (SPM) and confocal laser scanning microscopes (CLSM). Moreover,the spatial method was also used for the photogrammetric self-calibration of scanning electronmicroscopes (SEM).Inordertoimplementthecalibrationstrategytoallscanningmicroscopesused,thelandmark-based principle of reference points often applied at land survey or at close-range applications hasbeen transferred to the nano- and micro-range in the form of nanomarker. In order to function asa support to the nanomarkers, slope-shaped step pyramids have been developed and fabricated byfocused ion beam (FIB) induced metal deposition.