Grating Diffraction Calculator (GD-Calc) - Demo and Tutorial Guide

1 ®Grating Diffraction Calculator (GD-Calc ) – Demo and Tutorial Guide Overview..................................................................................................................... 2 Demo 1a: Uniperiodic, sinusoidal grating .................................................................. 4 Demo 1b, 1c: Uniperiodic, sinusoidal grating (deep profile, metallic) ...................... 7 Demo 2: Biperiodic grating comprising rectangular pyramids................................... 9 Demo 3 and demo 4: Biperiodic checkerboard grating .............................................. 9 Demo 5: Biperiodic grating comprising circular pillars ........................................... 17 Demo 6 and 7: Biperiodic grating comprising a skewed metal grid........................ 21 Demo 8: Biperiodic grating comprising a square metal grid................................... 26 Demo 9: Alignment sensor ...................................................................................... 27 Demo10: Slanted lamellar grating ........................................................................... 30 Demo 11: Crossed-line grating ................................................................................ 32 Appendix A: Interface for gdc_demo_engine.p....................................................... 34 Appendix B. Algorithm notes for circle_partition.m............................................... 37 ...