DRC Tutorial

MEMS Pro V3 Design Rule CheckerMEMSCAP Inc.Yiching LiangMarch 6, 2002Design Rules¤ Geometric constraints in layouts, limited by fabrication capability¤ Design rule sets: sets of rules for a specific fabrication process– Usually provided by foundries¤ To check a layout for design rule violations:– Define design rules– Run Design Rule Checker (DRC)¤ Mixed MEMS and IC design rule sets – All-angle support for MEMS2¤1Design Rule Checker Commands¤ Setup DRC– Sets up the design rules¤ DRC – Runs DRC on entire layout¤ DRC Box– Runs DRC on a selected (rectangular) region¤ Clear Error Layer– Removes error flags created by previous DRC3Setup DRC¤ Design rule definition– Graphical interface– Text file¤ Can be created, loaded from file, or imported from Dracula® rule set4¤2Design Rule Types¤ Types of design rules:– Minimum width– Exact width– Not exist– Overlap– Spacing– Surround– Extension5Minimum Width Rule¤ The Minimum width rule specifies the minimum width of all objects, in any direction, on the specified layer6¤3Exact Width Rule¤ The Exact width rule specifies the exact width of all objects on the named layer– The width of octagons is measured between parallel sides7Not Exist Rule¤ The Not exist rule specifies that no objects should exist on the named layer– Has no associated distance8¤4Overlap Rule¤ The Overlap rule specifies the minimum amount that an object on one layer must overlap an object on another layer ...