Lecture 23 Optical MEMS (5

• cours magistral

EEL6935 Advanced MEMS 2005 H. Xie 1 Lecture 23 Optical MEMS (5) „ Agenda: Ê MEMS in Optical Communications 4/8/2005 EEL6935 Advanced MEMS (Spring 2005) Instructor: Dr. Huikai Xie EEL6935 Advanced MEMS 2005 H. Xie 2 MEMS Devices Giles et al., IEEE J. STQE, 1999 MEMS in Optical Communication Systems

• axis scanning micromirror array mems
• sipoly-sipoly
• optical attenuators
• lucent mems oxc mirror array chip prototype
• advanced mems
• 2005 h. xie
• oxc yamamoto
• mirror